Reseachers Databook

Faculty of Engineering, Graduate School of Engineering, IWATE UNIVERSITY
JAPANESE

MUKAIGAWA SeijiAssociate Professor

Affiliation Faculty of Engineering
Department of Electrical Engineering and Computer Science

Graduate School of Engineering
·Master's Programs
Electrical Engineering and Computer Science
·Doctoral Programs
Electrical Engineering and Computer Science
Keywords Electric Discharge, Plasma, Semiconductors
Summary My research interest is mainly focused on the generation and applications of discharge plasma, which is widely used to improve the surface quality of materials and semiconductor device processing. I am currently engaged in measuring the thermal flux from plasma to substrate; conducting research into low dielectric thin films, atmospheric plasma and microplasma; and performing calculations on discharge plasma. In an effort to promote the application of atmospheric plasma, I have been involved in research into surface treatments (hydrophilic, hydrophobic and nitriding treatments) of polymer materials together with researchers in and outside of the university.
Research Fields Discharge Plasma, Semiconductor Engineering
Subjects Electronic Devices I, Electric Mathematics, Vector Analysis
[Master's Programs] Advanced Electronic Devices
[Doctoral Programs] Advanced High-Frequency Devices
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